English Safety Data Sheet Database 中文版 MSDS

trichlorosilane

CAS No. 10025-78-2 | PubChem CID 24811
Section 1. Identification
Chemical Nametrichlorosilane CAS No.10025-78-2
Synonymssilicochloroform Chinese Name三氯硅烷
Molecular FormulaCl3HSi Molecular Weight135.45
UN No.1295 Data SourcePubChem (NIH/NLM)
GHS Hazard Classification
Signal Word DANGER
Pictograms GHS02 · Flammable GHS05 · Corrosive GHS06 · Acute Toxic GHS07 · Irritant GHS08 · Health Hazard
Hazard Statements H224H260H302H314H318H331H250H332H370H372H330H371
Precautionary Statements P210P223P231+P232P233P240P241P242P243P260P261P264P264+P265P270P271P280P301+P317P301+P330+P331P302+P335+P334P302+P361+P354P303+P361+P353P304+P340P305+P354+P338P316P317P321P330P363P370+P378P402+P404P403+P233P403+P235P405P501P222P231P308+P316P319P284P320

Section 2. Hazards Identification

H224: Extremely flammable liquid and vapor [Danger Flammable liquids]

H260: In contact with water releases flammable gases which may ignite spontaneously [Danger Substances and mixtures which in contact with water, emit flammable gases]

H302: Harmful if swallowed [Warning Acute toxicity, oral]

H314: Causes severe skin burns and eye damage [Danger Skin corrosion/irritation]

H318: Causes serious eye damage [Danger Serious eye damage/eye irritation]

H331: Toxic if inhaled [Danger Acute toxicity, inhalation]

P210, P223, P231+P232, P233, P240, P241, P242, P243, P260, P261, P264, P264+P265, P270, P271, P280, P301+P317, P301+P330+P331, P302+P335+P334, P302+P361+P354, P303+P361+P353, P304+P340, P305+P354+P338, P316, P317, P321, P330, P363, P370+P378, P402+P404, P403+P233, P403+P235, P405, and P501 (click each P-code to see the statement)

H224 (100%): Extremely flammable liquid and vapor [Danger Flammable liquids]

H250 (87.5%): Catches fire spontaneously if exposed to air [Danger Pyrophoric liquids]

H260 (13.1%): In contact with water releases flammable gases which may ignite spontaneously [Danger Substances and mixtures which in contact with water, emit flammable gases]

H302+H332 (68.2%): Harmful if swallowed or if inhaled [Warning Acute toxicity, oral; acute toxicity, inhalation]

H302 (100%): Harmful if swallowed [Warning Acute toxicity, oral]

H314 (99.4%): Causes severe skin burns and eye damage [Danger Skin corrosion/irritation]

H318 (12.7%): Causes serious eye damage [Danger Serious eye damage/eye irritation]

H331 (12.7%): Toxic if inhaled [Danger Acute toxicity, inhalation]

H332 (87.3%): Harmful if inhaled [Warning Acute toxicity, inhalation]

P210, P222, P223, P231, P231+P232, P233, P240, P241, P242, P243, P260, P261, P264, P264+P265, P270, P271, P280, P301+P317, P301+P330+P331, P302+P335+P334, P302+P361+P354, P303+P361+P353, P304+P340, P305+P354+P338, P316, P317, P321, P330, P363, P370+P378, P402+P404, P403+P233, P403+P235, P405, and P501 (click each P-code to see the statement)

Aggregated GHS information provided per 647 reports by companies from 8 notifications to the ECHA C&L Inventory. Each notification may be associated with multiple companies.

Information may vary between notifications depending on impurities, additives, and other factors. The percentage value in parenthesis indicates the notified classification ratio from companies that provide hazard codes. Only hazard codes with percentage values above 10% are shown. For more detailed information, please visit ECHA C&L website.

P260, P264, P280, P301+P330+P331, P302+P361+P354, P304+P340, P305+P354+P338, P316, P321, P363, P405, and P501 (click each P-code to see the statement)

H370: Causes damage to organs [Danger Specific target organ toxicity, single exposure]

H372: Causes damage to organs through prolonged or repeated exposure [Danger Specific target organ toxicity, repeated exposure]

P210, P223, P231+P232, P233, P240, P241, P242, P243, P260, P261, P264, P264+P265, P270, P271, P280, P301+P317, P301+P330+P331, P302+P335+P334, P302+P361+P354, P303+P361+P353, P304+P340, P305+P354+P338, P308+P316, P316, P317, P319, P321, P330, P363, P370+P378, P402+P404, P403+P233, P403+P235, P405, and P501 (click each P-code to see the statement)

H330: Fatal if inhaled [Danger Acute toxicity, inhalation]

H371: May cause damage to organs [Warning Specific target organ toxicity, single exposure]

P210, P223, P231+P232, P233, P240, P241, P242, P243, P260, P264, P264+P265, P270, P271, P280, P284, P301+P317, P301+P330+P331, P302+P335+P334, P302+P361+P354, P303+P361+P353, P304+P340, P305+P354+P338, P308+P316, P316, P317, P320, P321, P330, P363, P370+P378, P402+P404, P403+P233, P403+P235, P405, and P501 (click each P-code to see the statement)

H250: Catches fire spontaneously if exposed to air [Danger Pyrophoric liquids]

H332: Harmful if inhaled [Warning Acute toxicity, inhalation]

P210, P222, P231, P233, P240, P241, P242, P243, P260, P261, P264, P270, P271, P280, P301+P317, P301+P330+P331, P302+P335+P334, P302+P361+P354, P303+P361+P353, P304+P340, P305+P354+P338, P316, P317, P321, P330, P363, P370+P378, P403+P235, P405, and P501 (click each P-code to see the statement)

Section 4. First-Aid Measures

Fresh air, rest. Half-upright position. Artificial respiration may be needed. Refer for medical attention.

Remove contaminated clothes. Rinse skin with plenty of water or shower. Refer for medical attention .

First rinse with plenty of water for several minutes (remove contact lenses if easily possible), then refer for medical attention.

Rinse mouth. Do NOT induce vomiting. Give nothing to drink. Refer for medical attention .

INHALATION: remove victim from exposure; if breathing is difficult or stopped, give artificial respiration; call physician.

EYES or SKIN: flush with plenty of water immediately for at least 15 min. and get medical attention.

INGESTION: do NOT induce vomiting; give large amount of water; get medical attention. (USCG, 1999)

General First Aid:

· Call 911 or emergency medical service.

· Ensure that medical personnel are aware of the material(s) involved, take precautions to protect themselves and avoid contamination.

· Move victim to fresh air if it can be done safely.

· Administer oxygen if breathing is difficult.

· If victim is not breathing:

-- DO NOT perform mouth-to-mouth resuscitation; the victim may have ingested or inhaled the substance.

-- If equipped and pulse detected, wash face and mouth, then give artificial respiration using a proper respiratory medical device (bag-valve mask, pocket mask equipped with a one-way valve or other device).

-- If no pulse detected or no respiratory medical device available, provide continuous compressions. Conduct a pulse check every two minutes or monitor for any signs of spontaneous respirations.

· Remove and isolate contaminated clothing and shoes.

· For minor skin contact, avoid spreading material on unaffected skin.

· In case of contact with substance, remove immediately by flushing skin or eyes with running water for at least 20 minutes.

· For severe burns, immediate medical attention is required.

· Effects of exposure (inhalation, ingestion, or skin contact) to substance may be delayed.

· Keep victim calm and warm.

· Keep victim under observation.

· For further assistance, contact your local Poison Control Center.

· Note: Basic Life Support (BLS) and Advanced Life Support (ALS) should be done by trained professionals.

Specific First Aid:

· In case of contact with substance, wipe from skin immediately; flush skin or eyes with running water for at least 20 minutes.

In Canada, an Emergency Response Assistance Plan (ERAP) may be required for this product. Please consult the shipping paper and/or the "ERAP" section.

Section 5. Fire-Fighting Measures

Excerpt from ERG Guide 139 [Substances - Water-Reactive (Emitting Flammable and Toxic Gases)]:

DO NOT USE WATER OR FOAM. (FOAM MAY BE USED FOR CHLOROSILANES, SEE BELOW).

SMALL FIRE: Dry chemical, soda ash, lime or sand.

LARGE FIRE: DRY sand, dry chemical, soda ash or lime or withdraw from area and let fire burn. FOR CHLOROSILANES, DO NOT USE WATER; use alcohol-resistant foam; DO NOT USE dry chemicals, soda ash or lime on chlorosilane fires (large or small) as they may release large quantities of hydrogen gas that may explode. If it can be done safely, move undamaged containers away from the area around the fire.

FIRE INVOLVING TANKS, RAIL TANK CARS OR HIGHWAY TANKS: Fight fire from maximum distance or use unmanned master stream devices or monitor nozzles. Cool containers with flooding quantities of water until well after fire is out. Do not get water inside containers. Withdraw immediately in case of rising sound from venting safety devices or discoloration of tank. ALWAYS stay away from tanks in direct contact with flames. (ERG, 2024)

NO water. Use AFFF, powder, carbon dioxide. In case of fire: keep drums, etc., cool by spraying with water. NO direct contact with water.

If material on fire or involved in fire: Do not extinguish fire unless flow can be stopped. Use "alcohol" foam, dry chemical or carbon dioxide. Cool all affected containers with flooding quantities of water. Apply water from as far a distance as possible. Do not use water on material itself. If large quantities of combustibles are involved, use water in flooding quantities as spray and fog. Use water spray to knock-down vapors.

Do not use halocarbons. Dry powders and carbon dioxide may be ineffective. Approach fire from upwind to avoid hazardous vapors and toxic decomposition products. Material is reactive with water but can be extinguished with a 6% solution in water of medium expansion foam. Use water spray to keep fire exposed containers cool. For small fires use copious quantities of water as spray to react with chlorosilane.

Evacuation: If fire becomes uncontrollable or container is exposed to direct flame - consider evacuation of one-third (1/3) mile radius.

No water. Aqueous film forming foams (AFFF), powder, carbon dioxide ... Cool drums, etc, by spraying with water but avoid contact of the substance with water.

... Corrosive ... May accumulate static electricity. Water reactive ... Hydrochloric acid is released.

Difficult to extinguish; reignition may occur. Flashback along vapor trail may occur.

The vapor is heavier than air and may travel along the ground; distant ignition possible.

Reacts violently with fire extinguishing agents such as water.

Section 6. Accidental Release Measures

· CALL 911. Then call emergency response telephone number on shipping paper. If shipping paper not available or no answer, refer to appropriate telephone number listed on the inside back cover.

· Keep unauthorized personnel away.

· Stay upwind, uphill and/or upstream.

· Ventilate closed spaces before entering, but only if properly trained and equipped.

· ELIMINATE all ignition sources (no smoking, flares, sparks or flames) from immediate area.

· Do not touch or walk through spilled material.

· Stop leak if you can do it without risk.

· DO NOT GET WATER on spilled substance or inside containers.

· Use water spray to reduce vapors or divert vapor cloud drift. Avoid allowing water runoff to contact spilled material.

· FOR CHLOROSILANES, use alcohol-resistant foam to reduce vapors.

Small Spill

· Cover with DRY earth, DRY sand or other non-combustible material followed with plastic sheet to minimize spreading or contact with rain.

· Dike for later disposal; do not apply water unless directed to do so.

Powder Spill

· Cover powder spill with plastic sheet or tarp to minimize spreading and keep powder dry.

· DO NOT CLEAN-UP OR DISPOSE OF, EXCEPT UNDER SUPERVISION OF A SPECIALIST.

HCl - when spill Trichlorosilane into water.

Excerpt from ERG Guide 139 [Substances - Water-Reactive (Emitting Flammable and Toxic Gases)]:

IMMEDIATE PRECAUTIONARY MEASURE: Isolate spill or leak area in all directions for at least 50 meters (150 feet) for liquids and at least 25 meters (75 feet) for solids.

SPILL: See ERG Table 1 - Initial Isolation and Protective Action Distances on the UN/NA 1295 datasheet.

FIRE: If tank, rail tank car or highway tank is involved in a fire, ISOLATE for 800 meters (1/2 mile) in all directions; also, consider initial evacuation for 800 meters (1/2 mile) in all directions. (ERG, 2024)

Immediate precautionary measure

· Isolate spill or leak area in all directions for at least 50 meters (150 feet) for liquids and at least 25 meters (75 feet) for solids.

· For highlighted materials: see Table 1 - Initial Isolation and Protective Action Distances.

· For non-highlighted materials: increase the immediate precautionary measure distance, in the downwind direction, as necessary.

· If tank, rail tank car or highway tank is involved in a fire, ISOLATE for 800 meters (1/2 mile) in all directions; also, consider initial evacuation for 800 meters (1/2 mile) in all directions.

When spilled in water

Small spill:

- ISOLATE in all directions: 30 m (100 ft)

Large spill:

- ISOLATE in all directions: 60 m (200 ft)

- PROTECT people from downwind during DAY time: 0.1 km (0.1 mi)

- PROTECT people from downwind during NIGHT time: 0.1 km (0.1 mi)

- PROTECT people from downwind during DAY time: 0.5 km (0.3 mi)

- PROTECT people from downwind during NIGHT time: 1.5 km (0.9 mi)

Evacuate danger area! Consult an expert! Personal protection: chemical protection suit including self-contained breathing apparatus. Ventilation. Do NOT wash away into sewer. Collect leaking and spilled liquid in sealable non-plastic containers as far as possible. Absorb remaining liquid in dry sand or inert absorbent. Then store and dispose of according to local regulations.

Evacuate danger area! Consult an expert! Ventilation. Collect leaking and spilled liquid in sealable containers as far as possible; do not use plastic containers. Absorb remaining liquid in dry sand or inert absorbent and remove to safe place. Do NOT wash away into sewer. (Extra personal protection: chemical protection suit including self-contained breathing apparatus.)

Eliminate all ignition sources. Approach release from upwind. Keep water away from release. Stop or control the leak, if this can be done without undue risk. Prompt cleanup and removal are necessary. May ignite spontaneously in insulating materials (absorbent materials) depending on size of piles. Control runoff and isolate discharged material for proper disposal.

SRP: The most favorable course of action is to use an alternative chemical product with less inherent propensity for occupational exposure or environmental contamination. Recycle any unused portion of the material for its approved use or return it to the manufacturer or supplier. Ultimate disposal of the chemical must consider: the material's impact on air quality; potential migration in soil or water; effects on animal, aquatic, and plant life; and conformance with environmental and public health regulations.

SRP: Local exhaust ventilation should be applied wherever there is an incidence of point source emissions or dispersion of regulated contaminants in the work area. Ventilation control of the contaminant as close to its point of generation is both the most economical and safest method to minimize personnel exposure to airborne contaminants.

Section 7. Handling and Storage

Excerpt from ERG Guide 139 [Substances - Water-Reactive (Emitting Flammable and Toxic Gases)]:

ELIMINATE all ignition sources (no smoking, flares, sparks or flames) from immediate area. Do not touch or walk through spilled material. Stop leak if you can do it without risk. DO NOT GET WATER on spilled substance or inside containers. Use water spray to reduce vapors or divert vapor cloud drift. Avoid allowing water runoff to contact spilled material. FOR CHLOROSILANES, use alcohol-resistant foam to reduce vapors.

SMALL SPILL: Cover with DRY earth, DRY sand or other non-combustible material followed with plastic sheet to minimize spreading or contact with rain. Dike for later disposal; do not apply water unless directed to do so.

POWDER SPILL: Cover powder spill with plastic sheet or tarp to minimize spreading and keep powder dry. DO NOT CLEAN-UP OR DISPOSE OF, EXCEPT UNDER SUPERVISION OF A SPECIALIST. (ERG, 2024)

Fireproof. Separated from food and feedstuffs and incompatible materials. See Chemical Dangers. Cool. Dry. Well closed. Ventilation along the floor.

Fireproof. Separated from food and feedstuffs and incompatible materials ... Cool. Dry. Well closed. Ventilation along the floor.

Separate from water, alcohols, organic acids, peroxides, amines, and oxidizing materials. Outside or detached storage is preferred. Store away from heat, oxidizing materials, and sunlight. Must be stored in a dry location. Inside storage should be in a standard flammable liquids storage warehouse, room, or cabinet.

Section 8. Exposure Controls / Personal Protection

· Wear positive pressure self-contained breathing apparatus (SCBA).

· Wear chemical protective clothing that is specifically recommended by the manufacturer when there is NO RISK OF FIRE.

· Structural firefighters' protective clothing provides thermal protection but only limited chemical protection.

TIH (Toxic Inhalation Hazard) - Term used to describe gases and volatile liquids that are toxic when inhaled. Some are TIH materials themselves, e.g., chlorine, and some release TIH gases when spilled in water, e.g., chlorosilanes. [ERG 2016].

AEGL 1: Notable discomfort, irritation, or certain asymptomatic non-sensory effects. However, the effects are not disabling and are transient and reversible upon cessation of exposure (Unit: ppm)

AEGL 2: Irreversible or other serious, long-lasting adverse health effects or an impaired ability to escape (Unit: ppm)

AEGL 3: Life-threatening health effects or death (Unit: ppm)

AEGLs Status: Final

0.60 [ppm]

7.3 [ppm]

33 [ppm]

· DO NOT USE WATER OR FOAM. (FOAM MAY BE USED FOR CHLOROSILANES, SEE BELOW)

Small Fire

· Dry chemical, soda ash, lime or sand.

Large Fire

· DRY sand, dry chemical, soda ash or lime or withdraw from area and let fire burn.

· FOR CHLOROSILANES, DO NOT USE WATER; use alcohol-resistant foam; DO NOT USE dry chemicals, soda ash or lime on chlorosilane fires (large or small) as they may release large quantities of hydrogen gas that may explode.

· If it can be done safely, move undamaged containers away from the area around the fire.

Fire Involving Tanks, Rail Tank Cars or Highway Tanks

· Fight fire from maximum distance or use unmanned master stream devices or monitor nozzles.

· Cool containers with flooding quantities of water until well after fire is out.

· Do not get water inside containers.

· Withdraw immediately in case of rising sound from venting safety devices or discoloration of tank.

· ALWAYS stay away from tanks in direct contact with flames.

ERPG-1: 1 ppm - one hour exposure limit: 1 = mild transient health effects or objectionable odor [AIHA]

ERPG-2: 3 ppm - one hour exposure limit: 2 = impaired ability to take protective action [AIHA]

ERPG-3: 25 ppm - one hour exposure limit: 3 = life threatening health effects [AIHA]

Emergency Response Planning Guidelines (ERPG): ERPG(1) 1 ppm (no more than mild, transient effects) for up to 1 hr exposure; ERPG(2) 3 ppm (without serious, adverse effects) for up to 1 hr exposure; ERPG(3) 25 ppm (not life threatening) up to 1 hr exposure.

Workplace Environmental Exposure Level (WEEL): Short-term Exposure Limit (STEL) 0.5 ppm, ceiling.

No indication can be given about the rate at which a harmful concentration of this substance in the air is reached on evaporation at 20 °C.

The substance is corrosive to the eyes, skin and respiratory tract. Corrosive on ingestion. Inhalation of the vapour may cause lung oedema. Inhalation may cause asthma-like reactions. Exposure could cause death. Medical observation is indicated.

Acid-vapor-type respiratory protection; rubber gloves; chemical worker's goggles; other protective equipment as necessary to protect skin and eyes. (USCG, 1999)

... Positive pressure self-contained breathing apparatus.

Acid-vapor-type respiratory protection; rubber gloves; chemical worker's goggles; other protective equipment as necessary to protect skin and eyes.

NO open flames, NO sparks and NO smoking. Closed system, ventilation, explosion-proof electrical equipment and lighting. Do NOT use compressed air for filling, discharging, or handling.

STRICT HYGIENE! IN ALL CASES CONSULT A DOCTOR!

Use ventilation, local exhaust or breathing protection.

Protective gloves. Protective clothing.

Wear face shield or eye protection in combination with breathing protection.

Do not eat, drink, or smoke during work.

Section 9. Physical and Chemical Properties

Trichlorosilane appears as a colorless fuming liquid with a pungent odor. Flash point 7 °F. Vapor and liquid cause burns. More dense than water. Vapors are heavier than air.

Colorless fuming liquid with a pungent odor; [ICSC]

COLOURLESS VOLATILE FUMING LIQUID WITH PUNGENT ODOUR.

Colorless liquid

ACRID ODOR

90 °F at 760 mmHg (USCG, 1999)

31.8 °C at 760 mm Hg, also reported as 36.5 °C /at 760 mm Hg/

33 °C @760 [mm Hg]

-197 °F (USCG, 1999)

-126.5 °C

-128.2 °C

greater than -58 °F (USCG, 1999)

[ERG 2016] -14 °C

7 °F (-14 °C) (Open cup)

-27 °C c.c.

Sol in benzene, carbon disulfide, chloroform, carbon tetrachloride

Sol in ether, heptane, perchloroethylene

Solubility in water: reaction

1.344 at 68 °F (USCG, 1999) - Denser than water; will sink

1.3417 at 20 °C/4 °C; 1.3830 at 0 °C/4 °C

Relative density (water = 1): 1.34

1.331 @25 °C

4.67 (AIR= 1)

Relative vapor density (air = 1): 4.7

594.0 [mmHg]

Vapor pressure, kPa at 20 °C: 65.8

750 [mm Hg] @31.6 °C

Volitile, moblie liquid. Fumes in air.

220 °F (USCG, 1999)

360 °F (182 °C)

When heated to decomposition it emits toxic fumes of /hydrogen chloride/.

0.397 centipoise at 0 °C; 0.332 centipoise at 20 °C; 0.316 centipoise at 25 °C

Corrodes metal after reacting with moisture to form hydrochloric acid

85 BTU/lb= 47 Cal/g= 2.0X10+5 J/kg

Index of refraction: 1.4020 at 20 °C/D; 1.3983 at 25 °C/D

Dipole moment: 0.97

Trichlorosilane is ordinarily a source for silicon deposition at > 1150 °C.

Organosilanes containing one or more Si--H bonds have excellent reducing capabilities. /Organosilanes/

The polarity of the Si--H bond is opposite to that of the C--H bond. This difference in polarity imparts hydride character to the Si--H bonds of organosilanes. This difference in electronegativities is not as great as in ionic hydrides, and the Si--H bond is still largely (98%) covalent. /Organosilanes/

For more Other Experimental Properties (Complete) data for TRICHLOROSILANE (7 total), please visit the HSDB record page.

Section 10. Stability and Reactivity

Highly flammable. Ignites spontaneously in air [NFPA, 1991]. Reacts violently with water, steam, moisture in air to generate heat and flammable (H2) and corrosive (HCl) gases. [Handling Chemicals Safely 1980. p. 924].

Based on a scenario where the chemical is spilled into an excess of water (at least 5 fold excess of water), half of the maximum theoretical yield of Hydrogen Chloride gas will be created in 0.03 minutes. Experimental details are in the following: "Development of the Table of Initial Isolation and Protective Distances for the 2008 Emergency Response Guidebook", ANL/DIS-09-2, D.F. Brown, H.M. Hartmann, W.A. Freeman, and W.D. Haney, Argonne National Laboratory, Argonne, Illinois, June 2009.

Chlorosilanes

Highly Flammable

Water-Reactive

Pyrophoric

TRICHLOROSILANE reacts with alcohols, acetone, light metals with generation of heat and combustible (H2) and corrosive (HCl) gases [Handling Chemicals Safely 1980. p. 924].

... Water reactive. Hydrochloric acid is released ... Reacts violently with water and aqueous soln, alcohols, organic acids, peroxides, amines, and oxidizing materials ...

... They will react with water or steam to produce heat, toxic & corrosive fumes of hydrogen chloride. /Chlorosilanes/

Can react vigorously with oixidizing materials.

Use of a single portion of trichlorosilane added to acetonitrile at 10 °C reduce diphenyl sulfoxide led to a violent explosion. The reaction previously had been effected uneventfully in a wide range of other solvents. The explosion was attributed to use of acetonitrile as solvent and/or the addition of the trichlorosilane as a single portion.

For more Hazardous Reactivities and Incompatibilities (Complete) data for TRICHLOROSILANE (6 total), please visit the HSDB record page.

Section 11. Toxicological Information

The substance can be absorbed into the body by inhalation of its vapour and by ingestion.

Cough. Sore throat. Burning sensation. Laboured breathing. Shortness of breath. Symptoms may be delayed.

Redness. Pain. Blisters. Skin burns.

Redness. Pain. Severe deep burns.

Burning sensation. Abdominal pain. Shock or collapse.

Dermatotoxin - Skin burns.

Lacrimator (Lachrymator) - A substance that irritates the eyes and induces the flow of tears.

Toxic Pneumonitis - Inflammation of the lungs induced by inhalation of metal fumes or toxic gases and vapors.

LCLo (rat) = 500 ppm/4h

LD50 Rat oral 1.03 g/kg

LC50 Rat inhalation 2767 ppm/1 hr

LD50 Mouse 1500 mg/cu m/2 hr

LC50 Mouse inhalation 1.5 mg/L/2 hr

No specific antidote is available /for chlorosilanes/, but first aid treatment consists of copious irrigation with water, & subsequent treatment is as for chemical burns in general. /Chlorosilanes/

Basic treatment: Establish a patent airway (oropharyngeal or nasopharyngeal airway, if needed). Suction if necessary. Watch for signs of respiratory insufficiency and assist ventilations if necessary. Administer oxygen by nonrebreather mask at 10 to 15 L/min. Monitor for pulmonary edema and treat if necessary ... Anticipate seizures and treat if necessary ... Monitor for shock and treat if necessary ... For eye contamination, flush eyes immediately with water. Irrigate each eye continuously with 0.9% saline (NS) during transport ... Do not use emetics. For ingestion, rinse mouth and administer 5 ml/kg up to 200 ml of water for dilution if the patient can swallow, has a strong gag reflex, and does not drool. Administer activated charcoal (refer to ingestion protocol in Section Three ... Cover skin burns with sterile dressings after decontamination ... /Silane, Chlorosilane, and Related Compounds/

Advanced treatment: Consider orotracheal or nasotracheal intubation for airway control in the patient who is unconscious, has severe pulmonary edema, or is in severe respiratory distress. Early intubation at the first sign of upper airway obstruction may be necessary. Positive-pressure ventilation techniques with a bag-valve-mask device may be beneficial. Consider drug therapy for pulmonary edema ... Monitor cardiac rhythm and treat arrhythmias if necessary ... Start IV administration of D5W /SRP: "To keep open", minimal flow rate/. Use 0.9% saline (NS) or lactated Ringer's (LR) if signs of hypovolemia are present. For hypotension with signs of hypovolemia, administer fluid cautiously. Consider vasopressors if patient is hypotensive with a normal fluid volume. Watch for signs of fluid overload ... Treat seizures with diazepam or lorazepam ... Use proparacaine hydrochloride to assist eye irrigation ... /Silane, Chlorosilane, and related compounds/

FIRST AID: Inhalation--Fresh air, rest. Half-upright position. Artificial respiration may be needed. Refer for medical attention ... The symptoms of lung oedema often do not become manifest until a few hours have passed and they are aggravated by physical effort. Rest and medical observation are therefore essential. Immediate administration of an appropriate inhalation therapy by a doctor or a person authorized by him/her, should be considered ... Skin--Remove contaminated clothes. Rinse skin with plenty of water or shower. Refer for medical attention; Eyes--First rinse with plenty of water for several minutes (remove contact lenses if easily possible), then take to a doctor; Ingestion--Rinse mouth. Do NOT induce vomiting. Give nothing to drink. Refer for medical attention.

/SIGNS AND SYMPTOMS/ Inhalation causes severe irritation of respiratory system. Liquid causes severe burns of eyes and skin. Ingestion causes severe burns of mouth and stomach.

/SIGNS AND SYMPTOMS/ ... /Trichlorosilane/ is a lachrymator ...

/SIGNS AND SYMPTOMS/ ... Trichlorosilane/ is corrosive to the eyes, the skin and the respiratory tract. Corrosive on ingestion. Inhalation of its vapor may cause lung edema ... Inhalation ... may cause asthma-like reactions. Exposure may result in death ... The symptoms of lung edema often do not become manifest until a few hours have passed and they are aggravated by physical effort ...

/SIGNS AND SYMPTOMS/ ACUTE ... SYMPTOMS: Inhalation--Cough. Sore throat. Burning sensation. Labored breathing. Shortness of breath. Symptoms may be delayed ... Skin--Redness. Pain. Blisters. Skin burns; Eyes--Redness. Pain. Severe deep burns; Ingestion--Burning sensation. Abdominal pain. Shock or collapse.

/LABORATORY ANIMALS: Acute Exposure/ All these cmpd, even in very low doses ... caused severe burns of cornea and eyelids. ... /After/ application to the skin of the rabbit the region attacked by chlorosilanes blanches and then blisters appear ... /Chlorosilanes/[Lefaux, R. Practical Toxicology of Plastics. Cleveland: CRC Press Inc., 1968., p. 109]

/LABORATORY ANIMALS: Acute Exposure/ Tests by application of a drop to rabbit eyes have been made on tetrachlorosilane, dichloridimethyl silane, dichlorodiethylsilane, methyltrichlorosilane, & ethyl trichlorosilane. All the chlorosilanes were found to cause severe damage of the cornea & lids. More severe damage was caused by the alkylchlorosilanes than by tetrachlorosilane (silicone tetrachloride). The principal danger is from splash contamination. /Chlorosilanes/[Grant, W.M. Toxicology of the Eye. 3rd ed. Springfield, IL: Charles C. Thomas Publisher, 1986., p. 224]

/LABORATORY ANIMALS: Acute Exposure/ The acute inhalation toxicity of 10 chlorosilanes was investigated in Fischer 344 rats using a 1-hr whole-body vapor inhalation exposure and a 14-day recovery period. The median lethal concentration (LC50(1)) for each material was calculated from the nominal exposure concentrations and mortality. Experimentally derived LC50(1) values for monochlorosilanes (4257-4478 ppm) were greater than those for dichlorosilanes (1785-2092 ppm), which were greater than those for trichlorosilanes (1257-1611 ppm). Apparent was a strong structure-activity relationship (r2 = .97) between chlorine content and LC50(1) value. Estimated LC50(1) values for mono-, di-, and trichlorosilanes were determined to be 3262, 1639, and 1066 ppm, respectively, utilizing this relationship and the lower limit of the 95% prediction interval. The LC50(1) values determined in this series of studies were greater than that reported for hydrogen chloride (3124 ppm), when expressed on a chlorine equivalence basis (3570-5248 ppm), demonstrating that the acute toxicity of these chlorosilanes is similar to or less than that for hydrogen chloride.[Jean PA et al; Inhal Toxicol 18 (8): 515-22 (2006)]

/LABORATORY ANIMALS: Subchronic or Prechronic Exposure/ ... Groups of male and female Sprague-Dawley rats were exposed 6 hours/day, 5 days/week for a total of 9 exposures to concentrations of ... 0, 25, 50, or 100 ppm trichlorosilane (TCS). ... Exposure to TCS led to pneumonitis and alveolar histiocytosis in the 50 ppm and higher groups, and in the 100 ppm animals, 75% mortality. All treatment groups showed respiratory irritation, body weight reduction and increased lung weights.[EPA/OTS; Doc #89-900000005]

/GENOTOXICITY/ Ames test /in/ Salmonella typhimurium, /using trichlorosilane at/ 0.5, 5, 100, 500 uL/plate, with and without metabolic activation, /showed/ negative results.[European Chemicals Bureau; IUCLID Dataset, Trichlorosilane (10025-78-2) (2000 CD-ROM edition). Available from, as of October 16, 2006: http://esis.jrc.ec.europa.eu/]

Trichlorosilane's production and use as an intermediate in silicone synthesis may result in its release to the environment through various waste streams. If released to air, a vapor pressure of 594 mm Hg at 25 °C indicates trichlorosilane will exist solely as a vapor in the atmosphere. Vapor-phase trichlorosilane will be degraded in the atmosphere by reaction with photochemically-produced hydroxyl radicals; however, the rate of this reaction is not known. All silicon chlorides are immediately and completely hydrolyzed and trichlorosilane has been reported to hydrolyze instantaneously releasing hydrochloric acid. Trichlorosilane may volatilize from dry soil surfaces based upon its vapor pressure. Due to the rapid hydrolysis, bioconcentration of trichlorosilane is not expected. Occupational exposure to trichlorosilane may occur through inhalation and dermal contact with this compound at workplaces where trichlorosilane is produced or used. (SRC)

Trichlorosilane's production and use as an intermediate in silicone synthesis(1) may result in its release to the environment through various waste streams(SRC).

TERRESTRIAL FATE: All silicon chlorides are immediately and completely hydrolyzed by water(1); trichlorosilane has been reported to hydrolyze in water releasing hydrochloric acid(2). Due to the hydrolysis of trichlorosilane, adsorption to soil is not expected to be important fate process(SRC). Trichlorosilane is expected to volatilize from dry soil surfaces(SRC) based upon a vapor pressure of 594 mm Hg(3).

AQUATIC FATE: All silicon chlorides are immediately and completely hydrolyzed by water(1) and trichlorosilane has been reported to hydrolyze in water releasing hydrochloric acid(2). Due to the hydrolysis of trichlorosilane, volatilization, biodegradation and bioaccumulation are not expected to be important fate process(SRC).

ATMOSPHERIC FATE: According to a model of gas/particle partitioning of semivolatile organic compounds in the atmosphere(1), trichlorosilane, which has a vapor pressure of 594 mm Hg at 25 °C(2), is expected to exist solely as a vapor in the ambient atmosphere.

ATMOSPHERIC FATE: In the trophosphere, the ultimate fate of chlorosilane is probably determined by hydrolysis of the silicon-chlorine bonds in water droplets. /Chlorosilanes/

ATMOSPHERIC FATE: In arid regions, some transport of chlorosilanes to the stratosphere might occur. In the stratosphere, photolysis by short wavelength light is expected. /Chlorosilanes/

The rate constant for the vapor-phase reaction of trichlorosilane with photochemically-produced hydroxyl radicals has been estimated as 1.5X10-13 cu cm/molecule-sec at 25 °C(SRC) using a structure estimation method(1). This corresponds to an atmospheric half-life of about 36 days at an atmospheric concentration of 5X10+5 hydroxyl radicals per cu cm(1). All silicon chlorides are immediately and completely hydrolyzed by water(2) and trichlorosilane has been reported to hydrolyze in water releasing hydrochloric acid(3). Methyl silanes are transparent to UV radiation >290 nm(4) and therefore methyltrichlorosilane is not expected to undergo direct photolytic degradation(SRC).

Trichlorosilane has been reported to hydrolyze immediately upon contact with water(1) and therefore bioconcentration of trichlorosilane is not expected(SRC).

All silicon chlorides are immediately and completely hydrolyzed by water(1). Trichlorosilane has been reported to hydrolyze in water releasing HCl(2); therefore, adsorption to soil is not expected to be an important fate process(SRC).

All silicon chlorides are immediately and completely hydrolyzed by water(1) and trichlorosilane has been reported to hydrolyze in water, releasing hydrochloric acid(2). Trichlorosilane is expected to volatilize from dry soil surfaces(SRC) based upon a vapor pressure of 594 mm Hg(3).

The high volatility of /chlorosilanes/ suggests that they will move freely into the atmosphere. /Chlorosilanes/

NIOSH (NOES Survey 1981-1983) has statistically estimated that 2,201 workers (267 of these are female) are potentially exposed to trichlorosilane in the US(1). Occupational exposure to trichlorosilane may occur through inhalation and dermal contact with this compound at workplaces where trichlorosilane is produced or used(SRC).

Section 12. Ecological Information

Trichlorosilane's production and use as an intermediate in silicone synthesis may result in its release to the environment through various waste streams. If released to air, a vapor pressure of 594 mm Hg at 25 °C indicates trichlorosilane will exist solely as a vapor in the atmosphere. Vapor-phase trichlorosilane will be degraded in the atmosphere by reaction with photochemically-produced hydroxyl radicals; however, the rate of this reaction is not known. All silicon chlorides are immediately and completely hydrolyzed and trichlorosilane has been reported to hydrolyze instantaneously releasing hydrochloric acid. Trichlorosilane may volatilize from dry soil surfaces based upon its vapor pressure. Due to the rapid hydrolysis, bioconcentration of trichlorosilane is not expected. Occupational exposure to trichlorosilane may occur through inhalation and dermal contact with this compound at workplaces where trichlorosilane is produced or used. (SRC)

Trichlorosilane's production and use as an intermediate in silicone synthesis(1) may result in its release to the environment through various waste streams(SRC).

TERRESTRIAL FATE: All silicon chlorides are immediately and completely hydrolyzed by water(1); trichlorosilane has been reported to hydrolyze in water releasing hydrochloric acid(2). Due to the hydrolysis of trichlorosilane, adsorption to soil is not expected to be important fate process(SRC). Trichlorosilane is expected to volatilize from dry soil surfaces(SRC) based upon a vapor pressure of 594 mm Hg(3).

AQUATIC FATE: All silicon chlorides are immediately and completely hydrolyzed by water(1) and trichlorosilane has been reported to hydrolyze in water releasing hydrochloric acid(2). Due to the hydrolysis of trichlorosilane, volatilization, biodegradation and bioaccumulation are not expected to be important fate process(SRC).

ATMOSPHERIC FATE: According to a model of gas/particle partitioning of semivolatile organic compounds in the atmosphere(1), trichlorosilane, which has a vapor pressure of 594 mm Hg at 25 °C(2), is expected to exist solely as a vapor in the ambient atmosphere.

ATMOSPHERIC FATE: In the trophosphere, the ultimate fate of chlorosilane is probably determined by hydrolysis of the silicon-chlorine bonds in water droplets. /Chlorosilanes/

ATMOSPHERIC FATE: In arid regions, some transport of chlorosilanes to the stratosphere might occur. In the stratosphere, photolysis by short wavelength light is expected. /Chlorosilanes/

The rate constant for the vapor-phase reaction of trichlorosilane with photochemically-produced hydroxyl radicals has been estimated as 1.5X10-13 cu cm/molecule-sec at 25 °C(SRC) using a structure estimation method(1). This corresponds to an atmospheric half-life of about 36 days at an atmospheric concentration of 5X10+5 hydroxyl radicals per cu cm(1). All silicon chlorides are immediately and completely hydrolyzed by water(2) and trichlorosilane has been reported to hydrolyze in water releasing hydrochloric acid(3). Methyl silanes are transparent to UV radiation >290 nm(4) and therefore methyltrichlorosilane is not expected to undergo direct photolytic degradation(SRC).

Trichlorosilane has been reported to hydrolyze immediately upon contact with water(1) and therefore bioconcentration of trichlorosilane is not expected(SRC).

All silicon chlorides are immediately and completely hydrolyzed by water(1). Trichlorosilane has been reported to hydrolyze in water releasing HCl(2); therefore, adsorption to soil is not expected to be an important fate process(SRC).

All silicon chlorides are immediately and completely hydrolyzed by water(1) and trichlorosilane has been reported to hydrolyze in water, releasing hydrochloric acid(2). Trichlorosilane is expected to volatilize from dry soil surfaces(SRC) based upon a vapor pressure of 594 mm Hg(3).

The high volatility of /chlorosilanes/ suggests that they will move freely into the atmosphere. /Chlorosilanes/

NIOSH (NOES Survey 1981-1983) has statistically estimated that 2,201 workers (267 of these are female) are potentially exposed to trichlorosilane in the US(1). Occupational exposure to trichlorosilane may occur through inhalation and dermal contact with this compound at workplaces where trichlorosilane is produced or used(SRC).

Section 13. Disposal Considerations

SRP: The most favorable course of action is to use an alternative chemical product with less inherent propensity for occupational exposure or environmental contamination. Recycle any unused portion of the material for its approved use or return it to the manufacturer or supplier. Ultimate disposal of the chemical must consider: the material's impact on air quality; potential migration in soil or water; effects on animal, aquatic, and plant life; and conformance with environmental and public health regulations.

Section 14. Transport Information

If ... THERE IS NO FIRE, go directly to the Table of Initial Isolation and Protective Action Distances /(see table below)/ ... to obtain initial isolation and protective action distances. IF THERE IS A FIRE, or IF A FIRE IS INVOLVED, go directly to the appropriate guide /(see guide(s) below)/ and use the evacuation information shown under PUBLIC SAFETY.

Table: Table of Initial Isolation and Protective Action Distances for Trichlorosilane (when spilled in water) [Table#2351]

Table of Water-Reactive Materials Which Produce Toxic Gases. Trichlorosilane

Table: Materials Which Produce Large Amounts of Toxic-by-Inhalation (TIH) Gas(es) When Spilled in Water [Table#2352]

/GUIDE 139: SUBSTANCES - WATER-REACTIVE (Emitting Flammable and Toxic Gases)/ Fire or Explosion: Produce flammable and toxic gases on contact with water. May ignite on contact with water or moist air. Some react vigorously or explosively on contact with water. May be ignited by heat, sparks or flames. May re-ignite after fire is extinguished. Some are transported in highly flammable liquids. Containers may explode when heated. Runoff may create fire or explosion hazard.

/GUIDE 139: SUBSTANCES - WATER-REACTIVE (Emitting Flammable and Toxic Gases)/ Health: Highly toxic: contact with water produces toxic gas, may be fatal if inhaled. Inhalation or contact with vapors, substance or decomposition products may cause severe injury or death. May produce corrosive solutions on contact with water. Fire will produce irritating, corrosive and/or toxic gases. Runoff from fire control may cause pollution.

For more DOT Emergency Guidelines (Complete) data for TRICHLOROSILANE (10 total), please visit the HSDB record page.

UN 1295; Trichlorosilane

IMO 4.3; Trichlorosilane

49 006 75; Trichlorosilane

No person may /transport,/ offer or accept a hazardous material for transportation in commerce unless that person is registered in conformance ... and the hazardous material is properly classed, described, packaged, marked, labeled, and in condition for shipment as required or authorized by ... /the hazardous materials regulations (49 CFR 171-177)./

The International Air Transport Association (IATA) Dangerous Goods Regulations are published by the IATA Dangerous Goods Board pursuant to IATA Resolutions 618 and 619 and constitute a manual of industry carrier regulations to be followed by all IATA Member airlines when transporting hazardous materials. Trichlorosilane is included on the dangerous goods list.

The International Maritime Dangerous Goods Code lays down basic principles for transporting hazardous chemicals. Detailed recommendations for individual substances and a number of recommendations for good practice are included in the classes dealing with such substances. A general index of technical names has also been compiled. This index should always be consulted when attempting to locate the appropriate procedures to be used when shipping any substance or article. Trichlorosilane is included on the dangerous goods list.

Dangerous When Wet Flammable Liquid Corrosive

Do not transport with food and feedstuffs.

Symbol: F+, C; R: 12-14-17-20/22-29-35; S: (2)-7/9-16-26-36/37/39-43-45

UN Hazard Class: 4.3; UN Subsidiary Risks: 3 and 8; UN Pack Group: I

Source: PubChem CID 24811 (NIH/NLM, public domain). Retrieved from PubChem, a public-domain chemistry database maintained by the U.S. National Library of Medicine. Last updated: 2026-08-02 09:18:26.
Disclaimer: This information is compiled for reference only and does not replace the manufacturer's official Safety Data Sheet. Always consult the supplier's SDS before handling any chemical.