English Safety Data Sheet Database 中文版 MSDS

tungsten hexafluoride

CAS No. 7783-82-6 | PubChem CID 522684
Section 1. Identification
Chemical Nametungsten hexafluoride CAS No.7783-82-6
Synonymstungstenfluoride Chinese Name六氟化钨
Molecular FormulaWF6 Molecular Weight297.83
UN No.2196 Data SourcePubChem (NIH/NLM)
GHS Hazard Classification
Signal Word DANGER
Pictograms GHS04 · Compressed Gas GHS05 · Corrosive GHS06 · Acute Toxic
Hazard Statements H280H301H311H314H318H330
Precautionary Statements P260P262P264P264+P265P270P271P280P284P301+P316P301+P330+P331P302+P352P302+P361+P354P304+P340P305+P354+P338P316P317P320P321P330P361+P364P363P403+P233P405P410+P403P501

Section 2. Hazards Identification

H280 (100%): Contains gas under pressure; may explode if heated [Warning Gases under pressure]

H301+H311 (26.8%): Toxic if swallowed or in contact with skin [Danger Acute toxicity, oral; acute toxicity, dermal]

H301 (26.8%): Toxic if swallowed [Danger Acute toxicity, oral]

H311 (26.8%): Toxic in contact with skin [Danger Acute toxicity, dermal]

H314 (100%): Causes severe skin burns and eye damage [Danger Skin corrosion/irritation]

H318 (13.4%): Causes serious eye damage [Danger Serious eye damage/eye irritation]

H330 (72.5%): Fatal if inhaled [Danger Acute toxicity, inhalation]

P260, P262, P264, P264+P265, P270, P271, P280, P284, P301+P316, P301+P330+P331, P302+P352, P302+P361+P354, P304+P340, P305+P354+P338, P316, P317, P320, P321, P330, P361+P364, P363, P403+P233, P405, P410+P403, and P501 (click each P-code to see the statement)

Aggregated GHS information provided per 142 reports by companies from 10 notifications to the ECHA C&L Inventory. Each notification may be associated with multiple companies.

Information may vary between notifications depending on impurities, additives, and other factors. The percentage value in parenthesis indicates the notified classification ratio from companies that provide hazard codes. Only hazard codes with percentage values above 10% are shown. For more detailed information, please visit ECHA C&L website.

H280: Contains gas under pressure; may explode if heated [Warning Gases under pressure]

H330: Fatal if inhaled [Danger Acute toxicity, inhalation]

P260, P271, P284, P304+P340, P316, P320, P403+P233, P405, P410+P403, and P501 (click each P-code to see the statement)

Section 4. First-Aid Measures

Excerpt from ERG Guide 125 [Gases - Toxic and/or Corrosive]:

Refer to the "General First Aid" section. Specific First Aid: In case of contact with liquefied gas, only medical personnel should attempt thawing frosted parts. In case of skin contact with hydrogen fluoride, anhydrous (UN1052), if calcium gluconate gel is available, rinse 5 minutes, then apply gel. Otherwise, continue rinsing until medical treatment is available. (ERG, 2024)

General First Aid:

· Call 911 or emergency medical service.

· Ensure that medical personnel are aware of the material(s) involved, take precautions to protect themselves and avoid contamination.

· Move victim to fresh air if it can be done safely.

· Administer oxygen if breathing is difficult.

· If victim is not breathing:

-- DO NOT perform mouth-to-mouth resuscitation; the victim may have ingested or inhaled the substance.

-- If equipped and pulse detected, wash face and mouth, then give artificial respiration using a proper respiratory medical device (bag-valve mask, pocket mask equipped with a one-way valve or other device).

-- If no pulse detected or no respiratory medical device available, provide continuous compressions. Conduct a pulse check every two minutes or monitor for any signs of spontaneous respirations.

· Remove and isolate contaminated clothing and shoes.

· For minor skin contact, avoid spreading material on unaffected skin.

· In case of contact with substance, remove immediately by flushing skin or eyes with running water for at least 20 minutes.

· For severe burns, immediate medical attention is required.

· Effects of exposure (inhalation, ingestion, or skin contact) to substance may be delayed.

· Keep victim calm and warm.

· Keep victim under observation.

· For further assistance, contact your local Poison Control Center.

· Note: Basic Life Support (BLS) and Advanced Life Support (ALS) should be done by trained professionals.

Specific First Aid:

· In case of contact with liquefied gas, only medical personnel should attempt thawing frosted parts.

· In case of skin contact with hydrogen fluoride, anhydrous (UN1052), if calcium gluconate gel is available, rinse 5 minutes, then apply gel. Otherwise, continue rinsing until medical treatment is available.

In Canada, an Emergency Response Assistance Plan (ERAP) may be required for this product. Please consult the shipping paper and/or the "ERAP" section.

Section 5. Fire-Fighting Measures

Excerpt from ERG Guide 125 [Gases - Toxic and/or Corrosive]:

SMALL FIRE: Dry chemical or CO2.

LARGE FIRE: Water spray, fog or regular foam. If it can be done safely, move undamaged containers away from the area around the fire. Do not get water inside containers. Damaged cylinders should be handled only by specialists.

FIRE INVOLVING TANKS: Fight fire from maximum distance or use unmanned master stream devices or monitor nozzles. Cool containers with flooding quantities of water until well after fire is out. Do not direct water at source of leak or safety devices; icing may occur. Withdraw immediately in case of rising sound from venting safety devices or discoloration of tank. ALWAYS stay away from tanks in direct contact with flames. (ERG, 2024)

If material involved in fire: Use dry chemical, dry sand, or carbon dioxide. Do not use water on material itself. If large quantities of combustibles are involved, use water in flooding quantities as spray and fog. Use water spray to knock-down vapors. Cool all affected containers with flooding quantities of water. Apply water from as far a distance as possible.

Section 6. Accidental Release Measures

· CALL 911. Then call emergency response telephone number on shipping paper. If shipping paper not available or no answer, refer to appropriate telephone number listed on the inside back cover.

· Keep unauthorized personnel away.

· Stay upwind, uphill and/or upstream.

· Many gases are heavier than air and will spread along the ground and collect in low or confined areas (sewers, basements, tanks, etc.).

· Ventilate closed spaces before entering, but only if properly trained and equipped.

· Do not touch or walk through spilled material.

· Stop leak if you can do it without risk.

· If possible, turn leaking containers so that gas escapes rather than liquid.

· Prevent entry into waterways, sewers, basements or confined areas.

· Do not direct water at spill or source of leak.

· Use water spray to reduce vapors or divert vapor cloud drift. Avoid allowing water runoff to contact spilled material.

· Isolate area until gas has dispersed.

Excerpt from ERG Guide 125 [Gases - Toxic and/or Corrosive]:

IMMEDIATE PRECAUTIONARY MEASURE: Isolate spill or leak area for at least 100 meters (330 feet) in all directions.

SPILL: See ERG Table 1 - Initial Isolation and Protective Action Distances on the UN/NA 2196 datasheet.

FIRE: If tank, rail tank car or highway tank is involved in a fire, ISOLATE for 1600 meters (1 mile) in all directions; also, consider initial evacuation for 1600 meters (1 mile) in all directions. (ERG, 2024)

Immediate precautionary measure

· Isolate spill or leak area for at least 100 meters (330 feet) in all directions.

· For highlighted materials: see Table 1 - Initial Isolation and Protective Action Distances.

· For non-highlighted materials: increase the immediate precautionary measure distance, in the downwind direction, as necessary.

· If tank, rail tank car or highway tank is involved in a fire, ISOLATE for 1600 meters (1 mile) in all directions; also, consider initial evacuation for 1600 meters (1 mile) in all directions.

Small spill:

- ISOLATE in all directions: 30 m (100 ft)

Large spill:

- ISOLATE in all directions: 150 m (500 ft)

- PROTECT people from downwind during DAY time: 0.2 km (0.1 mi)

- PROTECT people from downwind during NIGHT time: 0.8 km (0.5 mi)

- PROTECT people from downwind during DAY time: 0.8 km (0.5 mi)

- PROTECT people from downwind during NIGHT time: 2.8 km (1.7 mi)

Environmental considerations: Land spill: Dike surface flow using soil, sand bags, foamed polyurethane, or foamed concrete. Absorb bulk liquid with fly ash, cement powder, or commercial sorbents.

Environmental considerations: Water spill: Use natural deep water pockets excavated lagoons, or sand bag barriers to trap material at bottom. Remove trapped material with suction hoses.

Environmental considerations: Air spill: Vapor knockdown water is corrosive or toxic and should be diked for containment.

If material not involved in fire: Neutralize spilled material with crushed limestone, soda ash, or lime.

SRP: The most favorable course of action is to use an alternative chemical product with less inherent propensity for occupational harm/injury/toxicity or environmental contamination. Recycle any unused portion of the material for its approved use or return it to the manufacturer or supplier. Ultimate disposal of the chemical must consider: the material's impact on air quality; potential migration in soil or water; effects on animal and plant life; and conformance with environmental and public health regulations.

If material not involved in fire: Keep material out of water sources and sewers. Build dikes to contain low as necessary. Use water spray to knock-down vapors. Do not use water on material itself.

Personnel protection: Avoid breathing vapors. Keep upwind. Avoid bodily contact with the material. Do not handle broken packages unless wearing appropriate personal protective equipment. Wash away any material which may have contacted the body with copious amounts of water or soap and water. If contact with the material anticipated, wear appropriate chemical protective clothing.

Section 7. Handling and Storage

Excerpt from ERG Guide 125 [Gases - Toxic and/or Corrosive]:

Do not touch or walk through spilled material. Stop leak if you can do it without risk. If possible, turn leaking containers so that gas escapes rather than liquid. Prevent entry into waterways, sewers, basements or confined areas. Do not direct water at spill or source of leak. Use water spray to reduce vapors or divert vapor cloud drift. Avoid allowing water runoff to contact spilled material. Isolate area until gas has dispersed. (ERG, 2024)

May be stored in glass pressure ampuls.

Section 8. Exposure Controls / Personal Protection

· Wear positive pressure self-contained breathing apparatus (SCBA).

· Wear chemical protective clothing that is specifically recommended by the manufacturer when there is NO RISK OF FIRE.

· Structural firefighters' protective clothing provides thermal protection but only limited chemical protection.

Biological Exposure Indices (BEI) [ACGIH] - Fluorides in urine = 2 mg/L prior to shift or 3 mg/L at end of shift; (Repeated measurements recommended.)

TIH (Toxic Inhalation Hazard) - Term used to describe gases and volatile liquids that are toxic when inhaled. Some are TIH materials themselves, e.g., chlorine, and some release TIH gases when spilled in water, e.g., chlorosilanes. [ERG 2016].

1.0 [mg/m3], as F, inhalable fraction[German Research Foundation (DFG)]

The compound is currently at the Holding Status AEGLs which have been reviewed by the NAC/AEGL Committee and are on hold due to insufficient data to develop AEGL values.

AEGLs Status: Holding

1.0 [ppm]

24 [ppm]

44 [ppm]

2.5 [mg/m3], as F

3.0 [mg/m3], as W, respirable particulate matter (2.5 mg/m3, as F)

8 hr Time Weighted Avg (TWA): 1 mg/cu m; 15 min Short Term Exposure Limit (STEL): 3 mg/cu m. /Tungsten soluble compounds/

Small Fire

· Dry chemical or CO2.

Large Fire

· Water spray, fog or regular foam.

· If it can be done safely, move undamaged containers away from the area around the fire.

· Do not get water inside containers.

· Damaged cylinders should be handled only by specialists.

Fire Involving Tanks

· Fight fire from maximum distance or use unmanned master stream devices or monitor nozzles.

· Cool containers with flooding quantities of water until well after fire is out.

· Do not direct water at source of leak or safety devices; icing may occur.

· Withdraw immediately in case of rising sound from venting safety devices or discoloration of tank.

· ALWAYS stay away from tanks in direct contact with flames.

Excerpt from ERG Guide 125 [Gases - Toxic and/or Corrosive]:

Wear positive pressure self-contained breathing apparatus (SCBA). Wear chemical protective clothing that is specifically recommended by the manufacturer when there is NO RISK OF FIRE. Structural firefighters' protective clothing provides thermal protection but only limited chemical protection. (ERG, 2024)

Personnel protection: Wear positive pressure self-contained breathing apparatus. Wear appropriate chemical protective gloves, boots and goggles.

Section 9. Physical and Chemical Properties

Tungsten hexafluoride appears as a toxic corrosive light yellow liquid or gas. Noncombustible. Used in the manufacture of other chemicals and in the manufacture of electronics.

CBI; Gas Vapor; Liquid

Colorless gas or light-yellow liquid that decomposes in water; [Hawley]

Yellow liquid or colorless gas

Orthorhombic, deliquescent crystals when solid

17.5 °C @760 [mm Hg]

Reacts with water

Decomposes in water

Very soluble in carbon tetrachloride, cyclohexane

Solubility in anhydrous hexafluoride: 3.14 moles/1000 g HF

MIscible with many colvents (e.g. cyclohexane, carbon tetrachloride)

3.44 g/cu cm

13.069 @25 °C

Corrosive liquid

26.5 kJ/mol at 17.1 °C

Critical volume: 233 cu cm/mol

Specific gavity: 3.551 at 15 °C/liquid

Hexane solutions often strongly colored

phonon wavenumber

crystal structure

diffusion

enthalpy

Gibbs energy

partial pressure

positional coordinate

temperature-composition section

space group

phase diagram

unit cell parameter

melting temperature

heat capacity

Schoenflies notation

excitation energy

vapor-liquid equilibrium

fusion entropy

transition enthalpy

displacement parameter

internuclear distance

grain size

phase transition

Section 10. Stability and Reactivity

Decomposes in water giving hydrofluoric acid, another corrosive material.

Fluoride Salts, Soluble

Halogenating Agents

Water-Reactive

TUNGSTEN HEXAFLUORIDE emits very toxic and irritating fumes containing metallic tungsten and tungsten fluorides when heated to decomposition. Reacts violently with tetramethoxysilane [Jacob, E., Angew. Chem., 1982, 21, p. 143].

Section 11. Toxicological Information

Dermatotoxin - Skin burns.

Toxic Pneumonitis - Inflammation of the lungs induced by inhalation of metal fumes or toxic gases and vapors.

LC50 (rat) = 1,430 mg/m3

Immediate first aid: Ensure that adequate decontamination has been carried out. If patient is not breathing, start artificial respiration, preferably with a demand-valve resuscitator, bag-valve-mask device, or pocket mask, as trained. Perform CPR as necessary. Immediately flush contaminated eyes with gently flowing water. Do not induce vomiting. If vomiting occurs, lean patient forward or place on left side (head-down position, if possible) to maintain an open airway and prevent aspiration. Keep patient quiet and maintain normal body temperature. Obtain medical attention. /Fluorine and related compounds/

Basic treatment: Establish a patent airway (oropharyngeal or nasopharyngeal airway, if needed). Suction if necessary. Watch for signs of respiratory insufficiency and assist ventilations if necessary. Administer oxygen by nonrebreather mask at 10 to 15 L/min. Monitor for pulmonary edema and treat if necessary ... . Monitor for shock and treat if necessary ... . Anticipate seizures adn treat if necessary ... . For eye contamination, flush eyes immediately with water. Irrigate each eye continuously with 0.9% saline (NS) during transport ... . Do not use emetics. For ingestion, rinse mouth and administer 5 ml/kg up to 200 ml of water for dilution if the patent can swallow, has a strong gag reflex, and does not drool. ... . Cover skin burns with dry sterile dressings after decontamination ... . /Fluorine and related compounds/

Advanced treatment: Consider orotracheal or nasotracheal intubation for airway control in the patient who is unconscious, has severe pulmonary edema, or is in severe respiratory distress. Positive-pressure ventilation techniques with a bag valve mask device may be beneficial. Consider drug therapy for pulmonary edema ... . Monitor cardiac rhythm and treat arrhythmias if necessary ... . Start IV administration of D5W /SRP: "To keep open", minimal flow rate/. Use 0.9% saline (NS) or lactated Ringer's (LR) if signs of hypovolemia are present. For hypotension with signs of hypovolemia, administer fluid cautiously. Consider vasopressors if patient is hypotensive with a normal fluid volume. Watch for signs of fluid overload ... . Treat seizures with diazepam or lorazepam ... . Use proparacaine hydrochloride to assist eye irrigation ... . /Fluorine and related compounds/

Immediate first aid: Ensure that adequate decontamination has been carried out. If patient is not breathing, start artificial respiration, preferably with a demand-valve resuscitator, bag-valve-mask device, or pocket mask, as trained. Perform CPR as necessary. Immediately flush contaminated eyes with gently flowing water. Do not induce vomiting. If vomiting occurs, lean patient forward or place on left side (head-down position, if possible) to maintain an open airway and prevent aspiration. Keep patient quiet and maintain normal body temperature. Obtain medical attention. /Choking Agents (Pulmonary/Lung-Damaging Agents)/

For more Antidote and Emergency Treatment (Complete) data for Tungsten hexafluoride (6 total), please visit the HSDB record page.

According to the 2006 TSCA Inventory Update Reporting data, the number of persons reasonably likely to be exposed in the industrial manufacturing, processing, and use of tungsten hexafluoride is 1 to 99; the data may be greatly underestimated(1).

Section 12. Ecological Information

According to the 2006 TSCA Inventory Update Reporting data, the number of persons reasonably likely to be exposed in the industrial manufacturing, processing, and use of tungsten hexafluoride is 1 to 99; the data may be greatly underestimated(1).

Section 13. Disposal Considerations

SRP: The most favorable course of action is to use an alternative chemical product with less inherent propensity for occupational harm/injury/toxicity or environmental contamination. Recycle any unused portion of the material for its approved use or return it to the manufacturer or supplier. Ultimate disposal of the chemical must consider: the material's impact on air quality; potential migration in soil or water; effects on animal and plant life; and conformance with environmental and public health regulations.

Section 14. Transport Information

Poison Gas Corrosive

Source: PubChem CID 522684 (NIH/NLM, public domain). Retrieved from PubChem, a public-domain chemistry database maintained by the U.S. National Library of Medicine. Last updated: 2026-08-02 09:48:35.
Disclaimer: This information is compiled for reference only and does not replace the manufacturer's official Safety Data Sheet. Always consult the supplier's SDS before handling any chemical.